Effects of Various Ion-Typed Surfactants on Silicon Anisotropic Etching Properties in KOH and TMAH Solutions

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2004-11-26

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楊啟榮
陳柏穎
林明憲
邱源成
李榮宗

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http://rportal.lib.ntnu.edu.tw/handle/20.500.12235/36984

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