Please use this identifier to cite or link to this item: http://rportal.lib.ntnu.edu.tw:80/handle/20.500.12235/37048
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dc.contributor國立臺灣師範大學機電工程學系zh_tw
dc.contributor.author楊啟榮zh_tw
dc.contributor.author吳俊緯zh_tw
dc.date.accessioned2014-10-30T09:36:24Z-
dc.date.available2014-10-30T09:36:24Z-
dc.date.issued2009-04-01zh_TW
dc.identifierntnulib_tp_E0403_04_021zh_TW
dc.identifier.urihttp://rportal.lib.ntnu.edu.tw/handle/20.500.12235/37048-
dc.description.abstract一種陽極接合方法,包含下列步驟:(1)提供一矽基板;(2)提供一玻璃板,置放該矽基板上;以及(3)提供一上電極與一下電極,其中該上電極以一預設距離懸空於該玻璃板上,藉電弧為該玻璃板供應電流。zh_tw
dc.languagechizh_TW
dc.relation(發明第I 308135)zh_tw
dc.title一種陽極接合方法與設備zh_tw
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