全 SU-8 厚膜光阻之靜電式微夾持器研製

Please use this identifier to cite or link to this item: http://rportal.lib.ntnu.edu.tw:80/handle/20.500.12235/36824

Title:	全 SU-8 厚膜光阻之靜電式微夾持器研製
Authors:	國立臺灣師範大學機電工程學系楊啟榮程金保王服賢張峻銘施建富
Issue Date:	25-Nov-2005
URI:	http://rportal.lib.ntnu.edu.tw/handle/20.500.12235/36824
Other Identifiers:	ntnulib_tp_E0401_02_016
Appears in Collections:	教師著作

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