數位全像顯微系統特性、參數與規格之研究

Abstract

在本論文中，主要研究離軸式數位全像顯微系統之特性，討論各個參數對系統的影響，並制定出此數位全像顯微系統的規格。本研究工作首先探討目前數位全像顯微術的發展現況，數位全像顯微術的量測能力隨著各項研究越來越精確，在重建的過程中將結合濾波處理以提高影像對比，並且濾波範圍將與系統中所使用的物鏡相關，最後將所量測到樣本的相位資訊經由相位展開技術來獲得其原來的三維資訊，並且利用數位全像顯微術的數值重建特點，解決因為物鏡所限制住的焦深問題，完成焦深拓展的工作，並且於現行堪稱顯微技術強大的原子力顯微術量測結果做比較。本研究將制定出此數位全像顯微系統的規格，內文中將提出相關模擬與實驗結果，並加以分析說明。

In this study, we investigate the characteristics of off-axis digital holographic microscope system (DHM) and discuss the influence of various parameters on this system. First, we study the present situation and the development of digital holographic microscopy, and we know the measurement capability of digital holographic microscopy more accurate. In the reconstruction process will be combined with filtering to enhance image contrast, and the filter range is related to the objective in this system. The phase of the samples will be measured and to obtain the three-dimensional profile by phase unwrapping techniques. Using numerical reconstruction calculation to get a clear reconstructed image, and to expanded the depth of focus. The result by the EDOF DHM and atomic force microscopy (AFM) are compared. Finally, we will show the specifications of Digital Holographic Microscope system, and the analytical and experimental results are presented and discussed.