A novel electrochemical etching technique for fabricating microactuator in p-type silicon
| dc.contributor | 國立臺灣師範大學機電工程學系;國立臺灣師範大學工業教育學系 | zh_tw |
| dc.contributor.author | 楊啟榮 | zh_tw |
| dc.contributor.author | 林明憲 | zh_tw |
| dc.contributor.author | 劉榮德 | zh_tw |
| dc.contributor.author | 湯杜翔 | zh_tw |
| dc.date.accessioned | 2014-10-30T09:33:46Z | |
| dc.date.available | 2014-10-30T09:33:46Z | |
| dc.date.issued | 2005-11-10 | zh_TW |
| dc.identifier | ntnulib_tp_E0403_02_027 | zh_TW |
| dc.identifier.uri | http://rportal.lib.ntnu.edu.tw/handle/20.500.12235/35378 | |
| dc.language | en | zh_TW |
| dc.relation | 中華民國微系統暨奈米科技協會、南台科技大學主辦。第九屆奈米工程暨微系統技術研討會，台南，南台科技大學，臺灣。 | zh_tw |
| dc.title | A novel electrochemical etching technique for fabricating microactuator in p-type silicon | en_US |