全SU-8厚膜光阻式之微致動器研製
| dc.contributor | 國立臺灣師範大學機電工程學系 | zh_tw |
| dc.contributor.author | 楊啟榮 | zh_tw |
| dc.contributor.author | 楊智仲 | zh_tw |
| dc.contributor.author | 王服賢 | zh_tw |
| dc.contributor.author | 黃茂榕 | zh_tw |
| dc.contributor.author | 林明憲 | zh_tw |
| dc.date.accessioned | 2014-10-30T09:36:18Z | |
| dc.date.available | 2014-10-30T09:36:18Z | |
| dc.date.issued | 2004-11-13 | zh_TW |
| dc.identifier | ntnulib_tp_E0403_02_017 | zh_TW |
| dc.identifier.uri | http://rportal.lib.ntnu.edu.tw/handle/20.500.12235/36981 | |
| dc.language | chi | zh_TW |
| dc.relation | 第四屆精密機械製造研討會，台北：國立台北科技大學，臺灣。 | zh_tw |
| dc.title | 全SU-8厚膜光阻式之微致動器研製 | zh_tw |