微系統類LIGA製程與應用技術

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dc.contributor國立臺灣師範大學機電工程學系zh_tw
dc.contributor.author楊啟榮zh_tw
dc.contributor.author強玲英zh_tw
dc.contributor.author郭文凱zh_tw
dc.contributor.author張哲瑋zh_tw
dc.contributor.author林暉雄zh_tw
dc.contributor.author謝佑聖zh_tw
dc.contributor.author李育德zh_tw
dc.date.accessioned2014-10-30T09:36:15Z
dc.date.available2014-10-30T09:36:15Z
dc.date.issued2001-01-01zh_TW
dc.identifierntnulib_tp_E0403_01_001zh_TW
dc.identifier.issn1814-912Xzh_TW
dc.identifier.urihttp://rportal.lib.ntnu.edu.tw/handle/20.500.12235/36944
dc.languagechizh_TW
dc.publisher越吟出版社en_US
dc.relation電子月刊，66，114-122。zh_tw
dc.subject.other微機電系統zh_tw
dc.subject.otherLIGA製程 MEMSzh_tw
dc.title微系統類LIGA製程與應用技術zh_tw

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