光波導元件間耦合效應之研究

Abstract

本文主旨在研究光波導元件間耦合損失之參數之變異。首先，我們討論單模光纖對多模光纖的耦合效率，然後探討矽上絕緣層矽晶脊狀光波導對單模光纖與多模光纖的耦合效率，藉以得知光波導元件之耦合損失，接著我們再介紹SOI方形波導元件的製程與元件的光譜特性，藉以得知此元件的物理特性，另外我們同時也討論了不同結構厚度與寬度的元件與光纖的光耦合效率，亦即不同的幾何形狀所產生的耦合效率差異。最後，我們將元件縮小至奈米的尺度，討論在奈米尺度下，光波導元件與光波導元件的光耦合效率會有什麼不同的光學特性。

In this thesis, we discuss various coupling conditions between optical waveguide devices. We simulate the coupling loss of single mode fiber to multi-mode fiber, analyze optical waveguide based on SOI coupling to single mode fiber, furthermore, consider coupling effect between optical waveguide based on SOI and multi-mode fiber. The introduction of 2x2 Multi-mode Interference (MMI) SOI devices and measurement of photo luminance spectrum of the 2x2 MMI devices are reported. Discussion of coupling loss of different width and slab height of 2x2 MMI devices are also presented. Finally, we minimize the size of 2x2 MMI devices to nano-scale and discuss the coupling loss between nano-scale optical waveguide components and optical film.