使用P3HT製作有機氣體感測器檢測呼氣氨濃度

Abstract

聚三己基噻吩(Poly(3-hexylthiophene), P3HT)為具有高電洞遷移率(hole mobility)、良好穩定度、良好導電性及低加工成本而被應用在氣體感測元件。本研究利用原子層沉積(Atomic Layer Deposition, ALD)在陽極氧化鋁(Anodic Aluminum Oxide, AAO)中成長氧化鋅(Zinc Oxide, ZnO)形成陣列式氧化鋅奈米線。經旋轉塗佈法塗佈P3HT於氧化鋅奈米線上形成具有PN介面的有機半導體氣體感測器，並且改變旋轉塗佈的轉速(4000~6000 rpm)，得到P3HT厚度分別約為277 nm、397 nm、462 nm的P3HT有機氣體感測器。本實驗探討使用氧化鋅奈米線與氧化鋅薄膜作為N型半導體與不同旋轉塗佈轉速製備的P3HT作為P型半導體所結合的有機氣體感測元件對於氨氣之感測能力，製作過程中會探討不同製程參數所形成的氧化鋅奈米線之表面形貌與晶體結構，其性質分析以掃瞄式電子顯微鏡(Scanning Electron Microscopy, SEM)、X光繞射分析儀(X-ray diffractometer, XRD)檢測。製作完成之氣體感測元件其性質分析以霍爾量測(Hall Effect)與氣體感測設備(Gas-sensing device)檢測元件之電性與對氨氣之反應靈敏度等性質。實驗結果顯示使用氧化鋅奈米線比氧化鋅薄膜所量測到的靈敏度高，且P3HT越厚所量測到的靈敏度越好，旋轉塗佈轉速為4000 rpm時所製備出的P3HT有機氣體感測元件其靈敏度最高，可達到36.2%。Poly(3-hexylthiophene)(P3HT) having a high hole mobility, good stability, good electrical conductivity and low processing costs while being application at gas-sensing element. In this study, used atomic layer deposition(ALD) to grow zinc oxide (ZnO) at anodized aluminum oxide(AAO) forming zinc oxide nanowire array. P3HT was coated by spin coating formed on zinc oxide nanowire to be a PN heterogeneous interface of the organic semiconductor gas sensor, and changing the speed of the spin coating (4000 ~ 6000 rpm), to give different thickness of P3HT which were about 277 nm, 397 nm, 462 nm. In this study, used zinc oxide films and zinc oxide nanowires as N-type semiconductor for the organic gas-sensing element with different rotational speed coating prepared P3HT as P-type semiconductor bound for the sense of ammonia measurement capability, the production process will discuss the surface morphology and crystal structure of different process parameters formed of zinc oxide nanowires, the nature of the analysis with scanning electron microscopy(SEM), X-ray diffraction(XRD). Produced element analysis by Hall Effect and Gas-sensing device to detect their electrical properties and sensitivity of the ammonia. Experimental results show that the sensitivity of using zinc oxide nanowires is better than zinc oxide film, and the thicker P3HT is more sensitivity then others, spin-coating speed of 4000 rpm made P3HT organic gas-sensing element has highest sensitivity, and it can reach 36.2%.