矽上微環形共振腔之研究與應用

Abstract

本文為研究內結合光學波導主動與被動式元件其為未來發展之趨勢。我們將光學波導結合光學微環洐共振腔與空橋的結構並建置在SOI矽晶片上，此研究與模擬利用有效差分時域演算法進行模擬與設計。利用自由载子電漿分散效應以及蕭基二極體結構來調變此元件，藉由電光調變共振腔來製作濾波器與光學交換器應用於通訊上。在感測器應用上，我們模擬應用微環形共振器的光濾波器特性，在環形波導區域，利用生物物質之折射率變化，藉此從波導的輸出端擷取出不同的特定信號，並於此論文中，設計微環形共振腔的幾何結構，並探討其感測功率靈敏度之分析。在微環共振器感測器設計應用上我們著重於小尺寸、低成本以及高靈敏度之提升。

In this thesis, we integrated development of optical waveguide for the active and the passive device has become the future trend. We propose optical waveguide components for optical micro-ring resonator building on silicon-on-insulator (SOI) wafers, and also integrated air-bridge structure and the simulation is based on the well-known Finite-difference Time Domain (FDTD) technique. We used the free-carrier plasma dispersion effect and Schottky diode structure to modulate our filter and optical switch device; we devote our attraction on the electro-optical micro-ring resonator to apply in optical communication system. In sensing applications, we also design the geometric structure of resonance cavity to see different resonances are discussed in the thesis. We design the micro-ring their have small size, low cost, and potential for high sensitivity make them attractive for bio-sensing applications.