Preparation of Organic Soluble Polyimides and Their Applications in KrF Excimer Laser LIGA Process

dc.contributor 國立臺灣師範大學機電工程學系 zh_tw Hsieh, Yu-Sheng en_US Yang, Chii-Rong en_US Hwang, Guang-Yeu en_US Lee, Yu-Der en_US 2014-10-30T09:36:15Z 2014-10-30T09:36:15Z 2001-07-01 zh_TW
dc.description.abstract In this study two organic soluble polyimides were successfully synthesized via polycondensation of a hexafluoropropyl group contained dianhydride with two kinds of diamines. These two polyimides (DMDB/6FDA, OT/6FDA) can be dissolved in most aprotic solvents (for example, NMP, DMAc) and many other common solvents (for example, THF, DMSO). The soluble polyimides also show good thermal stability and high absorption at the KrF excimer laser wavelength (λ = 248 nm). (The absorption coefficients of DMDB/6FDA and OT/6FDA were 1.26×105 cm–1 and 1.49×105 cm–1, respectively.) The photoablation properties of the polyimides were studied in detail. Due to incorporating the hexafluoropropyl group into the chemical structure, these two polyimides have higher etching rates than Kapton (a commercial PI film). The effects of exposure parameters on linewidth and taper-angle of polyimides with different chemical structure were also investigated here. Under the proper control of exposure conditions, good precision patterns with near-vertical side wall can be produced. The 300 mm thick comb-shape and Fresnel patterns with 10 mm linewidth have been made. Moreover, the complementary metallic microstructures have also been realized in the following electroforming procedure. The results showed that these two soluble polyimides were very suitable for KrF Laser LIGA process. en_US
dc.description.uri;2-K/pdf zh_TW
dc.identifier ntnulib_tp_E0403_01_004 zh_TW
dc.identifier.issn 1022-1352 zh_TW
dc.language en zh_TW
dc.publisher Wiley-Blackwell en_US
dc.relation Macromolecular Chemistry and Physics, 202(11), 2394-2401. en_US
dc.relation.uri<2394::AID-MACP2394>3.0.CO;2-K zh_TW
dc.title Preparation of Organic Soluble Polyimides and Their Applications in KrF Excimer Laser LIGA Process en_US