White-light interferometric profile measurement system using spectral coherence

dc.contributor 國立臺灣師範大學機電工程學系 zh_tw
dc.contributor.author Chang, Gao-Wei en_US
dc.contributor.author Lin, Yu-Hsuan en_US
dc.contributor.author Yeh, Zong-Mu en_US
dc.date.accessioned 2014-10-30T09:36:13Z
dc.date.available 2014-10-30T09:36:13Z
dc.date.issued 2007-01-23 zh_TW
dc.description.abstract It is well known that white light interferometry (WLI) is important to nano-scale 3-D profile measurement technology. To archive cost-effective and accurate measurements, the researches for WLI are widely spreading. Our objective is to build up a 3-D micro-structure profile measurement system based on WLI, for micro-mechatronic, micro-optical, and semi-conductor devices. This paper briefly reviews related WLI theory and then the principle of spectral coherence is employed to improve the system design. Specifically, proper spectral filters can be used to extend the coherence length of the light source to the order of several ten micrometers. That is, the coherence length of the filtered light source is longer than that of the original source. In this paper, Michelson interference experiments are conducted with filtered and unfiltered white light sources, to show the feasibility of the concept of spectral coherence. The Michelson interferometer is adopted due to its convenience of optical installation and its acceptable tolerance to noise. The experiment results indicate that our approach is feasible and thus it can improve the WLI measurement performance. en_US
dc.identifier ntnulib_tp_E0402_02_028 zh_TW
dc.identifier.issn 0277-786X zh_TW
dc.identifier.uri http://rportal.lib.ntnu.edu.tw/handle/20.500.12235/36919
dc.language en zh_TW
dc.publisher SPIE en_US
dc.relation accepted by SPIE Symposium on MOEMS-MEMS 2007 Micro and Nanofabrication. (Paper Number 6463-18) en_US
dc.relation.uri http://dx.doi.org/10.1117/12.700003 zh_TW
dc.title White-light interferometric profile measurement system using spectral coherence en_US