KrF準分子雷射LIGA製程用厚膜光阻劑之合成與應用(II) Synthesis and Application of Thick Film Resist Satisfied with KrF Excimer Laser LIGA Process(II)

dc.contributor 國立臺灣師範大學機電工程學系;國立清華大學化學工程系 zh_tw
dc.contributor.author 李育德 zh_tw
dc.contributor.author 楊啟榮 zh_tw
dc.date.accessioned 2014-10-30T09:36:23Z
dc.date.available 2014-10-30T09:36:23Z
dc.date.issued 2001-07-31 zh_TW
dc.identifier ntnulib_tp_E0403_04_016 zh_TW
dc.identifier.uri http://rportal.lib.ntnu.edu.tw/handle/20.500.12235/37043
dc.language chi zh_TW
dc.relation (國科會專題研究計畫,NSC89-2216-E007-058) zh_tw
dc.title KrF準分子雷射LIGA製程用厚膜光阻劑之合成與應用(II) zh_tw
dc.title Synthesis and Application of Thick Film Resist Satisfied with KrF Excimer Laser LIGA Process(II) en_US
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