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科技與工程學院
機電工程學系
教師著作
教師著作
Permanent URI for this collection
http://rportal.lib.ntnu.edu.tw/handle/20.500.12235/31266
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Author
search.filters.author.李育德
1
search.filters.author.楊啟榮
Subject
search.filters.subject.LIGA
1
search.filters.subject.Excimer laser
1
search.filters.subject.Microelectromechanical systems (MEMS)
1
search.filters.subject.Photoablation
1
search.filters.subject.光分解挖除
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2000
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KrF準分子雷射LIGA製程用厚膜光阻劑之合成與應用
(
2000-07-31
)
李育德
;
楊啟榮
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