林文欽Lin, Wen-Chin謝濬澤Hsieh, Chun-Tse2023-12-082028-08-082023-12-082023https://etds.lib.ntnu.edu.tw/thesis/detail/93e446be93fc1bd042427003441b3d22/http://rportal.lib.ntnu.edu.tw/handle/20.500.12235/121173垂直磁各向異性（PMA）薄膜因其卓越的熱穩定性和反轉穩定性備受超高密度數據存儲器件的關注。該薄膜能在高溫環境下維持其磁性，並在磁場反轉下保持穩定的磁性狀態。實驗採用Co/Pd多層膜來進行PMA薄膜研究，實驗中選擇電子束熱蒸鍍技術將Co/Pd多層沉積在Al2O3（0001）基板上。研究運用磁光克爾顯微鏡和異常霍爾效應（AHE），在不同氫氣壓力下產生的磁、電特性。實驗結果表明，鈷鈀多層膜在不同氫氣壓力下的電阻變化與矯頑場、方正率的變化相關，這主要歸因於薄膜中鈀元素與氫氣的相互作用。據此得出結論，鈷鈀多層膜適用於氫氣存在和濃度的檢測，有望在下一代氫氣傳感器和磁電元件中應用。同時，PMA薄膜的特殊性質使其成為關鍵的磁存儲技術元素，其在超高密度數據存儲器件中能維持穩定磁化狀態，為新一代磁存儲器件、傳感器等應用提供了潛在潛力。這些研成果為開發新型高性能磁電元件提供了重要選擇。Perpendicular magnetic anisotropy (PMA) thin films have attracted much attention for ultra-high-density data storage devices due to their excellent thermal and inversion stability. The film can maintain its magnetic properties in high-temperature environments and maintain a stable magnetic state under magnetic field reversals. In the experiment, Co/Pd multilayer film is used to study PMA thin film. In the experiment, electron beam thermal evaporation technology is selected to deposit Co/Pd multilayer film on Al2O3 (0001) substrate. To study the magnetic and electrical properties produced under different hydrogen pressures by using the magneto-optic Kerr microscope and the anomalous Hall effect (AHE). The experimental results show that the resistance change of cobalt-palladium multilayer film under different hydrogen pressure is related to the change of coercive field and squareness rate, which is mainly attributed to the interaction between palladium element and hydrogen in the film. Consequently, it can be inferred that the cobalt-palladium multilayer film is well-suited for detecting the presence and concentration of hydrogen, with potential applications in the upcoming generation of hydrogen sensors and magnetoelectric components. Simultaneously, the unique properties of PMA films position them as fundamental elements in magnetic storage technology. They possess the ability to sustain a stable magnetization state within ultra-high-density data storage devices, thereby offering possibilities for applications like cutting-edge magnetic storage tools and sensors.異常霍爾效應鐵磁性氫氣效應垂直異向性Anomalous Hall effectFerromagnetismHydrogenation effectPerpendicular magnetic anisotropyetd