呂家榮Lu, Chia-Jung林珮盈Lin, Pei-Ying2019-09-042023-07-122019-09-042018http://etds.lib.ntnu.edu.tw/cgi-bin/gs32/gsweb.cgi?o=dstdcdr&s=id=%22G060542018S%22.&%22.id.&http://rportal.lib.ntnu.edu.tw:80/handle/20.500.12235/100180利用不同基材研究兩種不同微結構的氣體感測器，分別在陽極氧化鋁薄膜與玻璃毛細管內部塗佈奈米金粒子，藉由其表面電漿共振現象，以量測多種不同官能基的揮發性有機化合物。以上兩個氣體感測器皆搭配反射式光纖，藉此縮小感測光徑範圍，只需單一光點即可進行氣體偵測。經熱處理過的奈米金陽極氧化鋁薄膜感測器，所偵測的八種氣體皆呈現良好的線性關係(R2 >0.99)及再現性，偵測下限則尚有進步的空間，範圍為275 ~871 ppm。另外，使用3-胺基丙基三乙氧基矽烷和四乙氧基矽烷，透過自組裝薄膜反應機制將多層奈米金粒子修飾於內徑為0.8 mm的玻璃毛細管內壁，並與氣相層析儀串聯，成功地偵測十六種有機氣體，其結果顯示具有良好再現性、靈敏度及線性關係(R2 >0.99)，對於分子量、極性與折射率越大且沸點越高的化合物有較好的靈敏度，其中m-xylene與cyclohexanone的偵測下限皆小於20 ng。這些局部表面電漿共振感測器，開啟了未來偵測器進一步微小化的可能性。In this study, we develop two different surface structures of gas sensors by using different substrates. To dectect volatile organic compounds (VOCs) with different functional groups by localized surface plasmon resonance (LSPR), gold nanoparticles were modified on the anodic aluminum oxide (AAO) template and on the inner surface of glass capillary tube. The above two gas sensors detect gases with the reflective optical fiber, which can reduce the sensing range to be just a single light spot. The nanogold AAO sensor treated by heating detects eight organic gases, and the result shows good linearity (R2 > 0.99) and reproducibility. The limit of detection ranging from 275 to 871 ppm is still much to be desired. In addition, the multilayer gold nanoparticles were coated on the inner surface of the glass capillary tube (i.d. 0.8 mm) by the self-assembled film reaction with 3-aminopropyltriethoxysilane (APTMS) and tetraethoxynonane (TEOS). The multilayer gold nanoparticles sensor is integrated into the gas chromatograph (GC) system to successfully detect sixteen organic gases. The results indicates that multilayer gold nanoparticles sensor has good reproducibility, sensitivity, and linearity (R2 >0.99). Besides, the multilayer gold nanoparticles sensor has been demonstrated better sensitivity for compounds with higher molecular weight, polarity, refractive index and boiling point. The detection limit of m-xylene and cyclohexanone can be below 20 ng. These sensor structures make possible for future miniaturization of LSPR detectors.奈米金二氧化矽局部表面電漿共振陽極氧化鋁揮發性有機化合物gold naonparticlesLocalized Surface Plasmon Resonanceanodic aluminum oxideVolatile Organic Compounds