國立臺灣師範大學機電工程學系;國立清華大學化學工程系李育德楊啟榮2014-10-302014-10-302000-07-31http://rportal.lib.ntnu.edu.tw/handle/20.500.12235/37042微機電系統準分子雷射深蝕光刻電鑄模造術光分解挖除Microelectromechanical systems (MEMS)Excimer laserLIGAPhotoablationKrF準分子雷射LIGA製程用厚膜光阻劑之合成與應用Synthesis and Application of Thick Film Resist Satisfied with KrF Excimer Laser LIGA Process