國立臺灣師範大學機電工程學系楊啟榮陳柏穎鄭兆珉邱源成李榮宗2014-10-302014-10-302003-11-20http://rportal.lib.ntnu.edu.tw/handle/20.500.12235/36975Silicon anisotropic etching in alkaline KOH solution with mechanical agitation and surfactant additive