楊啓榮Yang, Chii-Rong張智耀Zhang, Zhi-Yao2025-12-092025-07-302025https://etds.lib.ntnu.edu.tw/thesis/detail/06477c6f2b28b72584f0a9bea431c65c/http://rportal.lib.ntnu.edu.tw/handle/20.500.12235/125209壓力感測器廣泛應用於智慧穿戴、生理監測、機器人觸覺系統與自動化控制等領域，隨著電子皮膚與人機互動技術的快速發展，具備高靈敏度、穩定性與可撓式的壓力感測器設計成為重要研究方向。本研究以此為出發點，提出一種新型離子電容式壓力感測器，藉由引入電雙層效應(Electrical Double Layer, EDL)，以有效提升其整體感測性能。研究採用熱塑性聚氨酯(TPU)為基底，添加碳酸鋰(Li2CO3, LC) 與([EMIM]+[TFSI]−)離子液體(IL)，製備TPU/IL/LC離子凝膠複合物介電層。在結構設計方面，運用3D列印製備倒金字塔結構之模具，接著以翻模技術製作出微結構陣列化的介電層，調整其結構尺寸與厚度參數來優化感測性能。實驗結果顯示，所製備之TPU/IL2.5感測器在低壓(0-130 kPa)範圍內具備64.49 kPa⁻¹的靈敏度，於中高壓(130-1400 kPa)區間則僅為4.04 kPa⁻¹。經Li2CO3改質後的TPU/IL2.5/LC0.20感測器在低壓範圍(0-130 kPa)內展現出高達211.57 kPa⁻¹的靈敏度，約為未改質感測器的3.28倍。此外，在130-550 kPa區間亦可達到104.26 kPa⁻¹的靈敏度，在550–1400 kPa區間則維持16.1 kPa⁻¹，顯示其於全壓力範圍內均具有大幅提升之靈敏度。TPU/IL2.5感測器具備最低檢測極限為0.052 Pa，而TPU/IL2.5/LC0.20感測器則進一步降低至0.047 Pa，顯示其微小壓力感測能力有所提升，解析度更高。此外，TPU/IL2.5/LC0.20感測器通過10000次壓縮與5000次彎曲循環測試，以及30天的長期穩定性測試，感測器依然維持穩定表現，展現出優異的可靠性與耐久性。在實際應用方面，TPU/IL2.5/LC0.20感測器可量測脈搏、呼吸、關節彎曲、水滴重量與氣壓微變等多種訊號，亦具備測量溫度與濕度之多功能感測效能。最後，透過CAV444 C-V轉換晶片、藍牙模組之整合與搭配Arduino控制板，即時將電容轉換成電壓訊號後傳輸至手機APP進行顯示，並成功應用於機械手臂之觸控暫停控制，顯示其作為撓性電子皮膚的潛力。整體成果證實本研究感測器具備高靈敏度、高穩定性與高可撓性，可提供未來智慧感測系統中材料設計、元件製作與應用整合潛力的可行解決方案。Pressure sensors are extensively utilized in fields such as smart wearables, physiological monitoring, robotic tactile systems, and automation control. With the rapid advancement of electronic skin and human–machine interaction technologies, the design of pressure sensors that possess high sensitivity, stability, and flexibility has become a crucial research direction. Motivated by this, the present study proposes a novel ionic capacitive pressure sensor that effectively enhances sensing performance by incorporating the Electrical Double Layer (EDL) effect. Thermoplastic polyurethane (TPU) was employed as the substrate material, with lithium carbonate (Li2CO3, LC) and the ionic liquid ([EMIM]+[TFSI]⁻, IL) added to fabricate a TPU/IL/LC ionic gel composite dielectric layer. Structurally, a 3D-printed inverted pyramid mold was used to create a microstructured dielectric layer array via replica molding, and the structural dimensions and thickness were optimized to improve sensing performance. Experimental results show that the fabricated TPU/IL2.5 sensor achieves a sensitivity of 64.49 kPa⁻¹ within the low-pressure range (0–130 kPa), but only 4.04 kPa⁻¹ in the medium-to-high pressure range (130–1400 kPa). After modification with Li2CO3, the TPU/IL2.5/LC0.20 sensor exhibits a significantly enhanced sensitivity of 211.57 kPa⁻¹ in the low-pressure range, approximately 3.28 times higher than the unmodified sensor. Furthermore, it maintains high sensitivities of 104.26 kPa⁻¹ and 16.1 kPa⁻¹ within the pressure ranges of 130–550 kPa and 550–1400 kPa, respectively, demonstrating substantial sensitivity improvements across the entire pressure spectrum. The TPU/IL2.5 sensor possesses a minimum detection limit of 0.052 Pa, which is further reduced to 0.047 Pa for the TPU/IL2.5/LC0.20 sensor, indicating enhanced capability for detecting subtle pressure changes and improved resolution. Additionally, the TPU/IL2.5/LC0.20 sensor maintains stable performance after 10000 compression cycles, 5000 bending cycles, and 30 days of long-term stability testing, demonstrating excellent reliability and durability. In practical applications, the TPU/IL2.5/LC0.20 sensor successfully measured various signals such as pulse, respiration, joint bending, droplet weight, and slight air pressure variations, and also exhibits multifunctional sensing capabilities for temperature and humidity. Finally, by integrating a CAV444 capacitance-to-voltage conversion chip, a Bluetooth module, and an Arduino control board, the sensor’s capacitance signals were converted to voltage signals and transmitted in real time to a mobile application for display. This system was successfully applied to touch-based pause control of a robotic arm, demonstrating the sensor’s potential as a flexible electronic skin. Overall, this study confirms that the developed sensor possesses high sensitivity, stability, and flexibility, providing a viable solution for material design, device fabrication, and application integration in future intelligent sensing systems.電子皮膚離子電容式壓力感測器電雙層碳酸鋰3D列印微金字塔結構多功能感測機械手臂Electronic skinIonic capacitive pressure sensorElectrical double layerLithium carbonate3D printingMicro pyramidal structureMultifunctional sensingRobotic arm學術論文