產生三維微細曲面之設計方法

Abstract

本論文提出一彈塑性撓性夾具（elastic-plastic flexure hinge mechanism，簡稱EPFHM）與壓電致動器產生三維微細曲面之設計方法論，彈塑性撓性夾具經由可控制性位移可產生不同需求之微米等級運動之自由曲面。 設計之初先藉由壓電致動器驅動弱化結構裝置產生X、Y及Z軸變形位移。利用快速原型機與粗糙ABS材料精確製作出的彈塑性撓性夾具，其變形特徵分析可藉由有限元素分析和系統性的實驗來完成。而透過微運動之方法可產生微米級之三維曲面；同時，經過實際驗證之結果顯示，彈塑性撓性夾具已能成功應用於微細曲面的產生。This paper proposes a design methodology of elastic-plastic flexure hinge mechanism (EPFHM) for precisely generating a three-dimensional micro-scale surface, which is made by elastic-plastic flexure hinge and piezoelectric actuator (PZT). An EPFHM aims at the capacity for generating free-form surface in micro-moving class via the controllable displacement of an EPFHM in relation to various required demands. The design process starts with a weakened mechanism to generate the deformable displacement driven by a PZT, which is applying on the x, y and z-axis. The deformation characteristics analyzed by the combination of finite element analysis and systematic experiment help precisely invent the EPFHM made of rough ABS by utilizing a rapid prototyping machine. The three-dimensional micro-scale surfaces will be generated by the micro-moving methodology. The results manifests that an EPFHM has been successfully applied to micro-scale surfaces after practical verification.