整合ZnO/TiO2鈣鈦礦薄膜與兆赫超材料之氮氧化物感測器的開發
No Thumbnail Available
Date
2022
Authors
Journal Title
Journal ISSN
Volume Title
Publisher
Abstract
氣體感測器(Gas sensor)大多是以電化學或半導體式進行檢測，通常在高溫下操作以實現高靈敏度，導致高功耗和爆炸性氣體檢測的火花風險。兆赫輻射(Terahertz radiation)的低能量光子(Light quantum)，不足以引起易燃材料的燃燒，又與分子產生強烈相互作用，故非常適合作為光學氣體感測器之輻射源。光學超材料(Metamaterial)由開環諧振器(Split-ring resonator)陣列組成，在開環間隙表現出很強的區域電場，因此可用於提高檢測物質與電磁波的交互作用。鈦酸鋅(ZnTiO3)為一種鈣鈦礦(Perovskite)材料，已廣泛的被運用於觸媒(Catalyst)領域與太陽能電池開發，其大量的離子點缺陷(Ionic point defects) 十分有利與氣體分子進行反應，但目前在尚沒有文獻使用鈣鈦礦結構之鈦酸鋅進行氣體感測元件的開發。因此，本研究致力於研發新型態的光學氣體感測器，以不同溫度煅燒鈦酸鋅複合還原氧化石墨烯(rGO) ，並與開環諧振器長度140微米之兆赫超材料整合成ZT400rGOA-140、ZT600rGOA-140、ZT800rGOA-140，進行NO氣體感測。本研究開發的ZT800rGOA-140在室溫下對於50 %的NO具有16.4 %的響應，高於ZT600rGOA-140的12.6 %和ZT400rGOA-140的8 %，且在0、50和100 %濃度的NO下，分別具有0 %、33.3 %和100 %的響應值。在丙酮、甲醇、乙醇、氨氣和NO環境下，響應值分別19 %、21.4 %、23.8 %、23.8 %和57.1 %，證明ZT800rGOA-140對NO具有不錯的感測選擇性，證明本研究所開發的ZT800rGOA-140有機會能成為氣體感測器的新興感測材料。
Gas sensors are mostly electrochemical or semiconductor-based detection, usually operating at high temperature to achieve high sensitivity, resulting in high power consumption and spark risk for explosive gas detection. The low-energy photons of terahertz radiation are not enough to cause the combustion of flammable materials, and have strong interactions with molecules, so they are very suitable as radiation sources for optical gas sensors. Optical metamaterials consist of arrays of split-ring resonators(SRR) that exhibit strong regional electric fields in the split-ring gaps, and thus can be used to improve the interaction of detected substances with electromagnetic waves. Zinc titanate (ZnTiO3) is a perovskite material, which has been widely used in the field of catalysts and solar cell development. However, there is currently no literature on the development of gas sensing elements using ZnTiO3 with perovskite structure.Therefore, this research is devoted to the development of a new optical gas sensor, calcined ZnTiO3 composite reduced graphene oxide (rGO), and integrated with a terahertz metamaterial with an SRR length of 140 μm to form a ZTrGOA-140 for NO gas sensing. The ZT800rGOA-140 developed in this study has a 16.4 % response at 50 % NO at room temperature, which is higher than ZT600rGOA-140(12.6 %) and ZT400rGOA-140(8 %). At 0, 50 and 100 % concentrations of NO, response are 0 %, 33.3 % and 100 %, respectively. At the acetone, methanol, ethanol, ammonia and NO, the response values were 19 %, 21.4 %, 23.8 %, 23.8 % and 57.1 %. Respectively, which proves that ZT800rGOA-140 has a good sensing selectivity for NO, which proves that this study developed ZT800rGOA-140 has the opportunity to become an emerging sensing material for gas sensors.
Gas sensors are mostly electrochemical or semiconductor-based detection, usually operating at high temperature to achieve high sensitivity, resulting in high power consumption and spark risk for explosive gas detection. The low-energy photons of terahertz radiation are not enough to cause the combustion of flammable materials, and have strong interactions with molecules, so they are very suitable as radiation sources for optical gas sensors. Optical metamaterials consist of arrays of split-ring resonators(SRR) that exhibit strong regional electric fields in the split-ring gaps, and thus can be used to improve the interaction of detected substances with electromagnetic waves. Zinc titanate (ZnTiO3) is a perovskite material, which has been widely used in the field of catalysts and solar cell development. However, there is currently no literature on the development of gas sensing elements using ZnTiO3 with perovskite structure.Therefore, this research is devoted to the development of a new optical gas sensor, calcined ZnTiO3 composite reduced graphene oxide (rGO), and integrated with a terahertz metamaterial with an SRR length of 140 μm to form a ZTrGOA-140 for NO gas sensing. The ZT800rGOA-140 developed in this study has a 16.4 % response at 50 % NO at room temperature, which is higher than ZT600rGOA-140(12.6 %) and ZT400rGOA-140(8 %). At 0, 50 and 100 % concentrations of NO, response are 0 %, 33.3 % and 100 %, respectively. At the acetone, methanol, ethanol, ammonia and NO, the response values were 19 %, 21.4 %, 23.8 %, 23.8 % and 57.1 %. Respectively, which proves that ZT800rGOA-140 has a good sensing selectivity for NO, which proves that this study developed ZT800rGOA-140 has the opportunity to become an emerging sensing material for gas sensors.
Description
Keywords
氣體感測器, 兆赫波, 超材料, 鈣鈦礦, 石墨烯氣凝膠, gas sensor, terahertz wave, metamaterials, perovskite, graphene aerogel