碳化鎢刀具披覆氮化鋯鎢硬質薄膜提升切削性能之研究 Coating of ZrWN hard film to improve the cutting performance of tungsten carbide tools

dc.contributor 屠名正 zh_TW
dc.contributor Twu, Ming-Jenq en_US
dc.contributor.author 彭紹瑋 zh_TW
dc.contributor.author Peng, Shao-Wei en_US
dc.date.accessioned 2019-09-03T12:09:07Z
dc.date.available 2021-12-31
dc.date.available 2019-09-03T12:09:07Z
dc.date.issued 2015
dc.description.abstract 氮化物薄膜具高硬度、高抗磨耗、低摩擦係數、優越抗化學腐蝕性及高溫熱穩定性等,常鍍覆於切削刀具、模具、磁頭、光學保護膜、生醫材料等,可有效延長刀具及模具壽命,廣用於傳統產業、機械業、航太工業等。 本研究利用直流(DC)磁控濺鍍,沉積氮化鋯鎢(ZrWN)薄膜於碳化鎢基材,使用Zr及W為靶材,Ar為濺射氣體,N2為反應氣體。應用田口實驗設計法,L9 (34)混合直交表與變異數分析,探討不同濺鍍參數(基材電漿蝕刻時間、氬氮比、沉積時間與製程溫度) 影響ZrWN薄膜特性,有效提升碳化鎢刀具切削壽命。以SEM觀察薄膜微結構,XRD分析薄膜結晶,奈米壓痕分析薄膜微硬度。 本研究車削AISI 304不鏽鋼(乾切削),顯示鍍層刀具的性能皆優於未鍍層刀具。配合田口-灰關聯分析,獲得本研究最佳製備ZrWN參數(A3B1C3D3),即基材電漿蝕刻時間=15 min,N2/(N2+Ar) =10%,沉積時間=15 min,製程溫度=200oC。經車削AISI 304不鏽鋼實驗驗証顯示,工件表面粗糙度由0.98降低到0.70μm,刀腹磨耗由21.15μm降低到14.02μm,且ZrWN薄膜硬度由21.65 GPa增加到24.18 GPa。 經分析顯示基材(刀具)電漿蝕刻時間為影響ZrWN薄膜製備參數的最顯著因子,較長的基材電漿蝕刻時間有較佳的ZrWN薄膜特性。 本研究比較二元合金氮化物(ZrN、WN)與三元合金氮化物(ZrWN),經實驗驗證,顯示ZrWN薄膜鍍層刀具乾切削AISI 304不鏽鋼,有較佳的切削性能(低工件表面粗糙度、低刀腹磨耗)。薄膜經奈米壓痕分析,顯示ZrWN薄膜有較高的硬度與彈性回復量。 zh_TW
dc.description.abstract Nitride film has high hardness, high wear resistance, low friction coefficient, excellent chemical resistance and thermal stability. Often coated in cutting tools, molds, heads, optical protection films, biomedical materials, which can effectively extend tool and cutting life, widely used in traditional industry, machinery industry, and the aerospace industry. In this study, the use of direct current (DC) magnetron sputtering, depositing tungsten nitride, zirconium (ZrWN) film on tungsten carbide substrates, using Zr and W target, Ar as the sputtering gas, N2 for the reaction gas. Application of Taguchi experimental design method, L9 (34) orthogonal table with mixed analysis of variance, explore different sputtering parameters (substrate plasma etching time, argon-nitrogen ratio, deposition time and substrate temperature) ZrWN film properties, effectively raising the carbonization tungsten cutting tool life. Film microstructure was observed with SEM, XRD analysis of thin-film crystal, nano-film micro hardness indentation analysis. In this study, AISI 304 stainless steel turning (dry cutting), display performance tool coating are superior to uncoated tools. With Taguchi - gray correlation analysis, get the best preparation of this study ZrWN parameters (A3B1C3D3), namely the substrate plasma etching time = 15 min, argon nitrogen ratio = 10%, deposition time = 15 min, substrate temperature = 200oC. AISI 304 stainless steel by turning experiments show that the surface roughness is reduced to 0.98 from the 0.70 μm, worn by the 21.15 μm knife belly down to 14.02 μm, and ZrWN film hardness by the 21.65 GPa to 24.18 GPa. The analysis shows substrate (tool) plasma etching time is the most significant factor affecting ZrWN film preparation parameters, and plasma etching the substrate long time gise a better ZrWN film properties. This study compared the binary alloy nitride (ZrN,WN) ternary alloy nitride (ZrWN), after experimental verification, the tool displays ZrWN film coating dry cutting AISI 304 stainless steel, has a better cutting performance (low surface roughness low cutter wear belly). The thin film nano-indentation analysis, display ZrWN film with high hardness and elastic recovery. en_US
dc.description.sponsorship 機電工程學系 zh_TW
dc.identifier G060173009H
dc.identifier.uri http://etds.lib.ntnu.edu.tw/cgi-bin/gs32/gsweb.cgi?o=dstdcdr&s=id=%22G060173009H%22.&%22.id.&
dc.identifier.uri http://rportal.lib.ntnu.edu.tw:80/handle/20.500.12235/96990
dc.language 中文
dc.subject 灰關聯 zh_TW
dc.subject 田口法 zh_TW
dc.subject 氮化鋯鎢 zh_TW
dc.subject 奈米壓痕 zh_TW
dc.subject Taguchi method en_US
dc.subject Grey system theory en_US
dc.subject ZrWN film en_US
dc.subject Nano-indentation en_US
dc.title 碳化鎢刀具披覆氮化鋯鎢硬質薄膜提升切削性能之研究 zh_TW
dc.title Coating of ZrWN hard film to improve the cutting performance of tungsten carbide tools en_US
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