探討氮化鈦介面層應用於氧化鋁鉿鐵電記憶體之電性可靠度研究

dc.contributor鄭淳護zh_TW
dc.contributorCheng, Chun-Huen_US
dc.contributor.author紀柏宇zh_TW
dc.contributor.authorChi, Po-Yuen_US
dc.date.accessioned2025-12-09T08:06:04Z
dc.date.available2030-01-09
dc.date.issued2025
dc.description.sponsorship機電工程學系zh_TW
dc.identifier61173031H-46514
dc.identifier.urihttps://etds.lib.ntnu.edu.tw/thesis/detail/2e7401e219000fd10228723a1c9d9e14/
dc.identifier.urihttp://rportal.lib.ntnu.edu.tw/handle/20.500.12235/125202
dc.language中文
dc.title探討氮化鈦介面層應用於氧化鋁鉿鐵電記憶體之電性可靠度研究zh_TW
dc.titleElectrical and Reliability Investigation of Hafnium Aluminum Oxide Ferroelectric Memory Using a Titanium Nitride Interface Layeren_US
dc.type學術論文

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