UV 厚膜光阻微影技術

dc.contributor國立臺灣師範大學機電工程學系zh_tw
dc.contributor.author殷宏林zh_tw
dc.contributor.author游智勝zh_tw
dc.contributor.author楊啟榮zh_tw
dc.contributor.author胡一君zh_tw
dc.contributor.author周曉宇zh_tw
dc.date.accessioned2014-10-30T09:36:22Z
dc.date.available2014-10-30T09:36:22Z
dc.date.issued2005-03-09zh_TW
dc.identifierntnulib_tp_E0403_03_004zh_TW
dc.identifier.isbn978-957-017-468-7zh_TW
dc.identifier.urihttp://rportal.lib.ntnu.edu.tw/handle/20.500.12235/37027
dc.languagechizh_TW
dc.publisher行政院國家科學委員會精密儀器發展中心zh_tw
dc.relation國科會精密儀器中心編。微機電系統技術與應用(上、下冊),172-185。zh_tw
dc.titleUV 厚膜光阻微影技術zh_tw

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