利用奈秒脈衝式雷射與奈米線微細成型電阻抗晶片於生醫檢測之研究

Abstract

隨著奈米科技(Nanotechnology)的不斷進步，近年來已有許多研究以奈米製程技術製作感測器，特別在製作生醫感測(Biomedical Sensing)晶片上，已投入大量心力進行研究，相較於現在醫院所使用之檢測機台，生醫晶片更可以達到定點照護(Point of care)，對於病患的症狀可以即時的偵測，有助於落實預防醫學之目的。本研究是以奈秒雷射微細加工技術(Nanosecond laser micromachining technique)，在網版印刷多層石墨烯製作電極(Screen-printed multilayered graphene electrode)，該研究探討其能量密度(Fluence)和脈衝重疊率(Pulsed overlap)於材料之加工深度與線寬之影響。本研究採以紫外光波段之奈秒雷射，可製作出之最小電極間距為60 μm。結合靜電紡絲技術(Electrospinning technique)製作聚乙烯醇(Polyvinyl alcohol, PVA)複合葡萄糖氧化酶(Glucose oxidase)之奈米線薄膜於電極結構上，藉由加入不同濃度之葡萄糖氧化酶觀察其電性變化，可以得到當葡萄糖濃度僅有0.011 mM時以具有明顯的電阻變化，且在葡萄糖濃度為0.011 mM - 0.41 mM之區間具有一趨近線性之電流變化，推測此方法對於低濃度之葡萄糖檢測具有良好的價值，並有機會應用於生醫晶片製作且進行大量生產。

With the progress of nanotechnology, there are a great amount of researches about fabricating sensors by means of nano processes techniques in recent years, especially for biomedical sensing devices. Compared with the testing machine in the hospital, biochips can achieve point of care. The disease can be analyzed instantaneously for patient that can be helpful to the goal of preventive medicine. Our research is to use the nanosecond laser micromachining techniques for fabricating the screen-printed multilayered graphene electrodes. The experimental conditions based on the laser fluence and pulsed overlap can affect the width and depth of multilayered graphene. This study uses the nanosecond laser pulses with the ultraviolet (UV) wavelength that can fabricate the minimum electrode distance of 60 μm. Combined withthe electrospinning technique, the nanofiber membrane which is made by polyvinyl alcohol (PVA) and glucose oxidase is fabricated on the surface of electrodes. The resistance response is measured through the different concentration of glucose. It can be found that there is the obvious change for the electrical resistance when the glucose concentration is 0.011 mM. In addition, the current response approaches a linear behavior when the glucose concentration is ranging between 0.011 mM and 0.41 mM. It can demonstrate that a prospective value for detection of the lower glucose concentration. Therefore, the study will be a possible opportunity for applying in manufacturing biochip and mass production.