以田口法搭配有限元分析之撓性絞鍊研究

Abstract

隨著產業往下一世代發展，超精密定位、微位移之課題更顯殷切。近年來關於這方面的研究大多搭配壓電塊與撓性絞鍊的設計，以達到奈米等級的定位。而在半導體製程上，除了原有的IC設計，更多了所謂的微機電系統（Micro Electro Mechanical System），而製程上的限制，也使得其發展多利用撓性絞鍊來設計感測器。 本篇論文以撓性絞鍊為主角，進行相關的文獻搜尋、探討，針對目前的研究進展及課題作一回顧整理。針對撓性絞鍊，本研究將其分為撓性佳易變形及剛性強位移解析度高之兩類，以田口法（Taguchi method）做參數規劃，並採用有限元素法（Finite Element Analysis）對其進行分析。由結果數據，探討各參數間對撓性絞鍊的撓性、剛性及應力分佈之比較分析，以獲得其最大影響參數；再進一步更改其形狀外觀設計，比較不同撓性絞鍊的位移及應力表現，探討其優缺點，並提出相關新型撓性絞鍊想法、設計，提供相關設計者參考使用。最後並對結果進行驗證實驗，以確認我們所提出的結論；進行驗證比較，以確認我們所提出之型態可符合一般使用。 利用田口法搭配有限元分析，可由分析結果數據，評估撓性結構設計上的參數要因，得到較佳的相對尺寸設計。

By the high technology for next generation, ultra-precision position and micro displacement is the key object. Those years, the researcher used piezoelectric actuator and flexure hinges to do some design for nanometer position. In semiconductor process, beside IC design, there is a MEMS (Micro Electro Mechanical System), for which the advantage of flexure hinges to design sensor must be taken. This study focus on the flexure hinges, searching relative papers to retrospection of recent advances. The flexure hinges were separated into two sorts: better flexibility easy to buckle and better rigidity to maintain position resolution. We use Taguchi method to design the static analysis parameters for flexure hinges and FEA (Finite Element Analysis) to analyse. It aims at to investigate the influence of the parameters on flexibility, stiffness, stress distribution, hence to identify the most significant parameters. Furthermore, according to the comparison of results of displacements and the stresses due to the changes of parameters of the structure, a novel design is proposed for designer to use. Finally, we design experiments to test and verify the results and discuss. The relative size of optimal design can instinctively be obtained with Taguchi methods and FEA.