超快雷射多尺度複合結構實現氣體檢測應用之研究
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2019
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Abstract
本研究是利用超快雷射(Ultrafast laser)之超短脈衝(Ultrashort pulses)的特性，進行多尺度複合結構(Multiscale composite structures)元件製作，進而應用於氣體檢測(Gas detection)。由於該雷射製程具較小熱影響區(Heat-affected zone)，以能精確進行尺寸的製作。本研究超快雷射製程是在導電石墨烯(Graphene)薄膜基材上，進行圖案化電極(Electrode)結構元件，其結構包括指叉狀元件(Interdigitated electrodes, IDEs)和微溝槽(Microgrooves)。另一方面，為結合導電奈米線於微結構元件，本研究透過水熱法(Hydrothermal)生長氧化鋅(ZnO)奈米線於指叉狀元件上，且在微溝槽生長氧化鋅奈米線，並調控浸泡種晶層溶液時間生長氧化鋅奈米線，將元件電阻從106 下降至約550 。本研究發現在生長溶液中添加甲醇(Methanol)為界面活性劑，將有助於於微結構底部生長氧化鋅奈米線。最後，本研究會於兩種氣體感測元件結構設計，進行不同氣體濃度一氧化氮(Nitric oxide, NO)之檢測探討。本研究結果顯示以指叉狀元件結構氣體感測元件，偵測氣體濃度於50 ppm時，氣體響應值(Response)為6%；氣體濃度於150 ppm時，氣體響應值可為18%；氣體濃度於300 ppm時，氣體響應值可為31%。以微溝槽作為氣體感測元件時，偵測氣體濃度於50 ppm時，氣體響應值為11%；氣體濃度於150 ppm時，氣體響應值為22%；氣體濃度於300 ppm時，氣體響應值為40%。
In this study, the ultrashort pulse laser with characteristics of ultrashort pulses were used to fabricate multiscale composite structures and then can be applied to gas detection. Due to the process with the small heat-affected zone, it can be precisely ablated the structure size. The ultrafast laser process of this study was to perform patterned electrode device on the conductive graphene substrate, in which the structures include interdigitated electrodes (IDEs) and micro grooves. The gas sensor device was fabricated with growth of ZnO nanowires by hydrothermal method on IDEs. The resistances of ZnO nanowires growth in microgrooves have changed at with different immersing time in seed layer solution. The resistance decreased from 106 to 550 . After adding methanol as a surfactant solution in the growth solution, the ZnO nanowires can be grown at the bottom of the microgroove structures. Finally, two gas sensing devices with the different sensing structures were designed to detect Nitric oxide (NO) at different concentrations. The results demonstrated that the gas sensing response were 6% and 18% when the concentration of NO were 50 ppm and 150 ppm with gas sensing device of IDEs structure. When the concentration of NO was 300 ppm, the gas sensing response can be increased to 31%. The gas sensing response were 11% and 22% when the concentration of NO were 50 ppm and 150 ppm with the gas sensing devices of microgroove structures. The gas sensing response was 40% when the concentration of NO was 300 ppm.
In this study, the ultrashort pulse laser with characteristics of ultrashort pulses were used to fabricate multiscale composite structures and then can be applied to gas detection. Due to the process with the small heat-affected zone, it can be precisely ablated the structure size. The ultrafast laser process of this study was to perform patterned electrode device on the conductive graphene substrate, in which the structures include interdigitated electrodes (IDEs) and micro grooves. The gas sensor device was fabricated with growth of ZnO nanowires by hydrothermal method on IDEs. The resistances of ZnO nanowires growth in microgrooves have changed at with different immersing time in seed layer solution. The resistance decreased from 106 to 550 . After adding methanol as a surfactant solution in the growth solution, the ZnO nanowires can be grown at the bottom of the microgroove structures. Finally, two gas sensing devices with the different sensing structures were designed to detect Nitric oxide (NO) at different concentrations. The results demonstrated that the gas sensing response were 6% and 18% when the concentration of NO were 50 ppm and 150 ppm with gas sensing device of IDEs structure. When the concentration of NO was 300 ppm, the gas sensing response can be increased to 31%. The gas sensing response were 11% and 22% when the concentration of NO were 50 ppm and 150 ppm with the gas sensing devices of microgroove structures. The gas sensing response was 40% when the concentration of NO was 300 ppm.
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Keywords
超快雷射, 導電奈米線, 多尺度複合結構, 電極結構, 水熱法, 氣體感測, Ultrafast laser, Conductive nanowires, Multiscale composite structures, Electrode structures, Hydrothermal method, Gas detection