Please use this identifier to cite or link to this item: http://rportal.lib.ntnu.edu.tw:80/handle/77345300/37042
Title: KrF準分子雷射LIGA製程用厚膜光阻劑之合成與應用
Synthesis and Application of Thick Film Resist Satisfied with KrF Excimer Laser LIGA Process
Authors: 國立臺灣師範大學機電工程學系;國立清華大學化學工程系
李育德
楊啟榮
Issue Date: 31-Jul-2000
URI: http://rportal.lib.ntnu.edu.tw/handle/77345300/37042
Other Identifiers: ntnulib_tp_E0403_04_015
Appears in Collections:教師著作

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