Please use this identifier to cite or link to this item: http://rportal.lib.ntnu.edu.tw:80/handle/77345300/37022
Title: 晶圓穿孔陣列之光輔助電化學蝕刻特性研究
Silicon wafer through-holes fabricated by photo-assisted electrochemical etching
Authors: 國立臺灣師範大學機電工程學系
楊啟榮
羅嘉佑
李幸憲
郭俊良
Issue Date: 21-Nov-2008
URI: http://rportal.lib.ntnu.edu.tw/handle/77345300/37022
Other Identifiers: ntnulib_tp_E0403_02_061
Appears in Collections:教師著作

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