Please use this identifier to cite or link to this item: http://rportal.lib.ntnu.edu.tw:80/handle/77345300/37001
Title: 利用電化學蝕刻技術應用於微懸浮結構之製作
Authors: 國立臺灣師範大學機電工程學系
楊啟榮
陳顯禎
郭華皓
李明承
曾柏翔
Issue Date: 24-Nov-2006
URI: http://rportal.lib.ntnu.edu.tw/handle/77345300/37001
Other Identifiers: ntnulib_tp_E0403_02_038
Appears in Collections:教師著作

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