Please use this identifier to cite or link to this item: http://rportal.lib.ntnu.edu.tw:80/handle/77345300/36984
Title: Effects of Various Ion-Typed Surfactants on Silicon Anisotropic Etching Properties in KOH and TMAH Solutions
Authors: 國立臺灣師範大學機電工程學系
楊啟榮
陳柏穎
林明憲
邱源成
李榮宗
Issue Date: 26-Nov-2004
URI: http://rportal.lib.ntnu.edu.tw/handle/77345300/36984
Other Identifiers: ntnulib_tp_E0403_02_020
Appears in Collections:教師著作

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