Please use this identifier to cite or link to this item: http://rportal.lib.ntnu.edu.tw:80/handle/77345300/36975
Title: Silicon anisotropic etching in alkaline KOH solution with mechanical agitation and surfactant additive
Authors: 國立臺灣師範大學機電工程學系
楊啟榮
陳柏穎
鄭兆珉
邱源成
李榮宗
Issue Date: 20-Nov-2003
URI: http://rportal.lib.ntnu.edu.tw/handle/77345300/36975
Other Identifiers: ntnulib_tp_E0403_02_011
Appears in Collections:教師著作

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