Please use this identifier to cite or link to this item: http://rportal.lib.ntnu.edu.tw:80/handle/77345300/36973
Title: 超音波振盪於TMAH溶液中對異方性矽蝕刻特性之影響
Authors: 國立臺灣師範大學機電工程學系
楊啟榮
陳柏穎
鄭兆珉
邱源成
李榮宗
Issue Date: 15-Nov-2003
URI: http://rportal.lib.ntnu.edu.tw/handle/77345300/36973
Other Identifiers: ntnulib_tp_E0403_02_009
Appears in Collections:教師著作

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