Please use this identifier to cite or link to this item: http://rportal.lib.ntnu.edu.tw:80/handle/77345300/36919
Title: White-light interferometric profile measurement system using spectral coherence
Authors: 國立臺灣師範大學機電工程學系
Chang, Gao-Wei
Lin, Yu-Hsuan
Yeh, Zong-Mu
Issue Date: 23-Jan-2007
Publisher: SPIE
Abstract: It is well known that white light interferometry (WLI) is important to nano-scale 3-D profile measurement technology. To archive cost-effective and accurate measurements, the researches for WLI are widely spreading. Our objective is to build up a 3-D micro-structure profile measurement system based on WLI, for micro-mechatronic, micro-optical, and semi-conductor devices. This paper briefly reviews related WLI theory and then the principle of spectral coherence is employed to improve the system design. Specifically, proper spectral filters can be used to extend the coherence length of the light source to the order of several ten micrometers. That is, the coherence length of the filtered light source is longer than that of the original source. In this paper, Michelson interference experiments are conducted with filtered and unfiltered white light sources, to show the feasibility of the concept of spectral coherence. The Michelson interferometer is adopted due to its convenience of optical installation and its acceptable tolerance to noise. The experiment results indicate that our approach is feasible and thus it can improve the WLI measurement performance.
URI: http://rportal.lib.ntnu.edu.tw/handle/77345300/36919
ISSN: 0277-786X
Other Identifiers: ntnulib_tp_E0402_02_028
Appears in Collections:教師著作

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