Please use this identifier to cite or link to this item: http://rportal.lib.ntnu.edu.tw:80/handle/77345300/36824
Title: 全 SU-8 厚膜光阻之靜電式微夾持器研製
Authors: 國立臺灣師範大學機電工程學系
楊啟榮
程金保
王服賢
張峻銘
施建富
Issue Date: 25-Nov-2005
URI: http://rportal.lib.ntnu.edu.tw/handle/77345300/36824
Other Identifiers: ntnulib_tp_E0401_02_016
Appears in Collections:教師著作

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