KrF準分子雷射LIGA製程用厚膜光阻劑之合成與應用(II)

Please use this identifier to cite or link to this item: http://rportal.lib.ntnu.edu.tw:80/handle/20.500.12235/37043

Title:	KrF準分子雷射LIGA製程用厚膜光阻劑之合成與應用(II) Synthesis and Application of Thick Film Resist Satisfied with KrF Excimer Laser LIGA Process(II)
Authors:	國立臺灣師範大學機電工程學系;國立清華大學化學工程系李育德楊啟榮
Issue Date:	31-Jul-2001
URI:	http://rportal.lib.ntnu.edu.tw/handle/20.500.12235/37043
Other Identifiers:	ntnulib_tp_E0403_04_016
Appears in Collections:	教師著作

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